4 papers
Accelerated development of amorphous InZnO thin films as transparent conductive Cu diffusion barriers
Stefanie Frick, Reyu Sakakibara, Manuel Kober-Czerny +4
In light of the increasing supply chain concerns regarding silver for solar cell metallization, the replacement of the silver contacts by copper is desirable. As copper diffuses re…
Accelerating the development of oxynitride thin films: A combinatorial investigation of the Al-Si-O-N system
Stefanie Frick, Oleksandr Pshyk, Arnold Müller +3
Oxynitrides are used in a variety of applications including photocatalysts, high-k dielectrics or wear-resistant coatings and often show intriguing multi-functionality. To accelera…
Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective Ion Acceleration using Synchronized Floating Potential HiPIMS
Jyotish Patidar, Oleksandr Pshyk, Lars Sommerhäuser +1
Ionized physical vapor deposition techniques, such as high-power impulse magnetron sputtering (HiPIMS) are gaining popularity due to their ability to produce high-quality thin film…
Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices
Jyotish Patidar, Kerstin Thorwarth, Thorsten Schmitz-Kempen +2
Fueled by the 5G revolution, the demand for advanced radio frequency micro-electromechanical systems (MEMS) based on AlScN is growing rapidly. However, synthesizing high-quality, t…