5 papers
Surface Platinum Alloying for Passivation of Oxide Interfaces on Superconducting Niobium Films
Ananya Chattaraj, Conan Weiland, Bruce Ravel +10
Dielectric loss arising from two-level systems (TLS) at surfaces and interfaces remains a primary limitation to coherence in superconducting transmon qubits. Niobium (Nb), a widely…
Phase Formation and Thermal Stability of Superconducting Platinum Silicide Thin Films on Silicon
Tharanga R. Nanayakkara, Ananya Chattaraj, Mingzhao Liu +1
Platinum silicide (PtSi) thin films are promising for silicon-based superconducting quantum devices due to their compatibility with CMOS fabrication, air stability, and superconduc…
Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes
Ekta Bhatia, Yingge Du, Krishna P Koirala +12
Surface oxides contribute to losses in superconducting transmon devices resulting in degraded performance. We explore the use of the damascene process to replace the sidewall nativ…
Temperature-Dependent Dielectric Function of Tantalum Nitride Formed by Atomic Layer Deposition for Tunnel Barriers in Josephson Junctions
Ekta Bhatia, Aaron Lopez Gonzalez, Yoshitha Hettige +9
We report the dielectric functions of insulating tantalum nitride (TaN) films, deposited using atomic layer deposition (ALD) on 300 mm Si/SiO2 substrates, to demonstrate their suit…
Effects of Integrated Heatsinking on Superconductivity in Tantalum Nitride Nanowires at the 300 Millimeter Scale
Ekta Bhatia, Tharanga R. Nanayakkara, Chenyu Zhou +14
We report the superconducting properties of tantalum nitride (TaN) nanowires and TaN/copper (TaN/Cu) bilayer nanowires fabricated on 300 mm silicon wafers using CMOS-compatible pro…