Scalable production of single 2D van der Waals layers through atomic layer deposition: Bilayer silica on metal foils and films

Gregory S. Hutchings, Xin Shen, Chao Zhou +10

The self-limiting nature of atomic layer deposition (ALD) makes it an appealing option for growing single layers of two-dimensional van der Waals (2D-VDW) materials. In this paper…