15 citations · 24 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2014★ 9 cited
Growth Kinetics of Ion Beam Sputtered Al-thin films by Dynamic Scaling Theory
Neha Sharma, K. Prabakar, S. Dash +1
This paper reports the study of growth kinetics of ion beam sputtered aluminum thin films. Dynamic scaling theory was used to derive the kinetics from AFM measurements. AFM imaging…
cond-mat.mtrl-sci2014★ 15 cited
Growth Kinetic studies of ion beam sputtered AlN-thin films: Effect of reactive assistance of nitrogen plasma
Neha Sharma, K. Prabhakar, S. Ilango +2
Reactive dual ion beam sputter deposition of AlN thin films was carried out for the analysis of surface growth characteristics by Atomic Force Microscopy. The variation of roughnes…