27 citations · 28 across the 5 of their papers we have counts for
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cond-mat.mtrl-sci2024
Long-Term Aging Study of a Silicon Nitride Nanomechanical Resonator
Michel Stephan, Alexandre Bouchard, Timothy Hodges +4
Short-term changes in the resonance frequency of silicon nitride (SiN) nanomechanical resonators can be measured very precisely due to low thermomechanical fluctuations resulting f…
eess.AS2024
Vibration Sensitivity of one-port and two-port MEMS microphones
Francis Doyon-D'Amour, Carly Stalder, Timothy Hodges +5
Micro-electro-mechanical system (MEMS) microphones (mics) with two acoustic ports are currently receiving considerable interest, with the promise of achieving higher directional se…