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physics.app-ph2022
Design and Fabrication of a Differential MOEMS Accelerometer Based on Fabry Perot micro-cavities
Mojtaba Rahimi, Mohammad Malekmohammad, Majid Taghavi +2
In this paper, a differential MOEMS accelerometer based on the Fabry-Perot (FP) micro-cavities is presented. The optical system of the device consists of two FP cavities and the me…
physics.app-ph2022★ 21 cited
Closed-Loop MOEMS Accelerometer
Majid Taghavi, Abolfazl Abedi, Gholam-Mohammad Parsanasab +4
In this paper, a closed-loop micro-opto-electro-mechanical system (MOEMS) accelerometer based on the Fabry-Pérot (FP) interferometer is presented. The FP cavity is formed between t…