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20222025
most citedUncovering the origin of interface stress enhancement and compressive-to-tensile stress transition in immiscible nanomultilayers

1 citations · 1 across the 2 of their papers we have counts for

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cond-mat.mtrl-sci2023

Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS

Jyotish Patidar, Amit Sharma, Siarhei Zhuk +7

Many technologies require highly-oriented and textured functional thin films. The most common synthe-sis approaches use on-axis sputter geometries. However, in some scenarios, on-a…