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Structural analysis of co-sputtered Cu-Nb and Cu-Pd textured thin films
Claudia Cancellieri, Giacomo Lorenzin, Yeliz Unutulmazsoy +2
Structural characterization of nanoscale-two-metal-phase systems, which exhibit partial, complete, or no mixing when co-sputtered with a few percent of a minority element, is extre…
Uncovering the origin of interface stress enhancement and compressive-to-tensile stress transition in immiscible nanomultilayers
Yang Hu, Giacomo Lorenzin, Jeyun Yeom +6
The intrinsic stress in nanomultilayers (NMLs) is typically dominated by interface stress, which is particularly high in immiscible Cu/W NMLs. Here, atomistic simulations with a ch…
Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS
Jyotish Patidar, Amit Sharma, Siarhei Zhuk +7
Many technologies require highly-oriented and textured functional thin films. The most common synthe-sis approaches use on-axis sputter geometries. However, in some scenarios, on-a…