Growth of p-doped 2D-MoS${}_2$ on metal oxides from spatial atomic layer deposition

André Maas, Kissan Mistry, Stephan Sleziona +4

In this letter we report on the synthesis of monolayers of MoS${}_2$ via chemical vapor deposition directly on thin films of Al${}_2$O${}_3$ grown by spatial atomic layer deposition. The…