290 citations · 584 across the 8 of their papers we have counts for
4 papers · 1 filter
Transcending the Acceleration-Bandwidth Trade-off: Lightweight Precision Stages with Active Control of Flexible Dynamics
Jingjie Wu, Lei Zhou
Micro/Nano-positioning stages are of great importance in a wide range of manufacturing machines and instruments. In recent years, the drastically growing demand for higher throughp…
FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation towards High-Throughput IC Manufacturing
Jingjie Wu, Lei Zhou
Precision motion stages play a critical role in various manufacturing and inspection equipment, for example, the wafer/reticle scanning in photolithography scanners and positioning…
Sequential Structure and Control Co-design of Lightweight Precision Stages with Active control of flexible modes
Jingjie Wu, Lei Zhou
Precision motion stages are playing a prominent role in various manufacturing equipment. The drastically increasing demand for higher throughput in integrated circuit (IC) manufact…
Control Co-design of Actively Controlled Lightweight Structures for High-acceleration Precision Motion Systems
Jingjie Wu, Lei Zhou
Precision motion stages are an essential part of a wide range of manufacturing equipment, and their motion performance are critical to the quality and throughput of the systems. Th…