10 citations · 14 across the 2 of their papers we have counts for
2 papers
physics.app-ph2023★ 10 cited
Squeeze film absolute pressure sensors with sub-millipascal sensitivity
Mohsen Salimi, Robin V. Nielsen, Henrik B. Pedersen +1
We report on the realization of ultrasensitive absolute pressure sensors based on silicon nitride membrane sandwiches. These sandwiches consist in a pair of highly-pretensioned, ul…
physics.app-ph2022★ 4 cited
Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures
Ali A. Darki, Robin V. Nielsen, Jens V. Nygaard +1
A detailed investigation of the structural and vibrational properties of various prestressed silicon nitride membranes patterned with one-dimensional photonic crystal structures is…