most cited3D large-scale fused silica microfluidic chips enabled by hybrid laser microfabrication for continuous-flow UV photochemical synthesis

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physics.app-ph2022★ 19 cited

3D large-scale fused silica microfluidic chips enabled by hybrid laser microfabrication for continuous-flow UV photochemical synthesis

Aodong Zhang, Jian Xu, Yucen Li +7

We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in-situ m…