3 citations · 5 across the 4 of their papers we have counts for
4 papers
Transforming Computational Lithography with AC and AI -- Faster, More Accurate, and Energy-efficient
Saumyadip Mukhopadhyay, Kiho Yang, Kasyap Thottasserymana Vasudevan +8
From climate science to drug discovery, scientific computing demands have surged dramatically in recent years -- driven by larger datasets, more sophisticated models, and higher si…
An Adversarial Active Sampling-based Data Augmentation Framework for Manufacturable Chip Design
Mingjie Liu, Haoyu Yang, Zongyi Li +7
Lithography modeling is a crucial problem in chip design to ensure a chip design mask is manufacturable. It requires rigorous simulations of optical and chemical models that are co…
Large Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Training
Haoyu Yang, Zongyi Li, Kumara Sastry +5
Machine learning techniques have been extensively studied for mask optimization problems, aiming at better mask printability, shorter turnaround time, better mask manufacturability…
Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks
Haoyu Yang, Zongyi Li, Kumara Sastry +6
Lithography simulation is a critical step in VLSI design and optimization for manufacturability. Existing solutions for highly accurate lithography simulation with rigorous models…