Time-of-flight recoil detection in transmission using pulsed keV ion beams enables sensitive multi-element profiling with high depth resolution

R. Holeňák, S. Lohmann, D. Primetzhofer

The potential of time-of-flight recoil detection in transmission geometry using pulsed keV ion beams for sensitive multi-element profiling of thin membranes and quasi-2D systems is…