4 papers
Characterization of Hydroxyls in Surface Oxide of Superconducting Tantalum and Their Mitigation in Quantum Circuits
Ekta Bhatia, Nicholas Pieniazek, Aleksandra Biedron +7
Recently, tantalum (Ta) has gained attention in superconducting quantum circuits due to the longer coherence times achieved when replacing niobium (Nb) in capacitor pads. Previous…
Temperature-Dependent Dielectric Function of Tantalum Nitride Formed by Atomic Layer Deposition for Tunnel Barriers in Josephson Junctions
Ekta Bhatia, Aaron Lopez Gonzalez, Yoshitha Hettige +9
We report the dielectric functions of insulating tantalum nitride (TaN) films, deposited using atomic layer deposition (ALD) on 300 mm Si/SiO2 substrates, to demonstrate their suit…
Effects of Integrated Heatsinking on Superconductivity in Tantalum Nitride Nanowires at the 300 Millimeter Scale
Ekta Bhatia, Tharanga R. Nanayakkara, Chenyu Zhou +14
We report the superconducting properties of tantalum nitride (TaN) nanowires and TaN/copper (TaN/Cu) bilayer nanowires fabricated on 300 mm silicon wafers using CMOS-compatible pro…
Ta-based Josephson junctions using insulating ALD TaN tunnel barriers
Ekta Bhatia, Jack Lombardi, Tuan Vo +16
Josephson junctions form the core circuit element in superconducting quantum computing circuits, single flux quantum digital logic circuits, and sensing devices such as SQUIDs. Alu…