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quant-ph2026
Krypton-sputtered tantalum films for scalable high-performance quantum devices
Maciej W. Olszewski, Lingda Kong, Simon Reinhardt +9
Superconducting qubits based on tantalum (Ta) thin films have demonstrated the highest-performing microwave resonators and qubits. This makes Ta an attractive material for supercon…
quant-ph2026★ 1 cited
Low-loss Nb on Si superconducting resonators from a dual-use spintronics deposition chamber and with acid-free post-processing
Maciej W. Olszewski, Jadrien T. Paustian, Tathagata Banerjee +13
Magnetic impurities are known to degrade superconductivity. For this reason, physical vapor deposition chambers that have previously been used for magnetic materials have generally…