Time-resolved study of carbonization and growth of ultrathin 3C-SiC on Si(111) under ultra-high vacuum

Pranjali Jadhao, Mojdeh Fallahpour, Josef Polčák +6

The early-stage formation of silicon carbide (SiC) on Si(111) by ethylene exposure under ultra-high vacuum (UHV) was investigated to resolve the time-dependent chemical and morphol…