4 papers
Transient population dynamics of nanoparticles during pulsed EUV exposures
M. Chaudhuri, L. C. J. Heijmans, A. M. Yakunin +3
The transient population dynamics of charged (postive or negative) and neutral nanoparticles have been investigated in a pulsed Extreme Ultra-Violet (EUV) exposure environment with…
Laser light scattering (LLS) to observe plasma impact on the adhesion of micrometer-sized particles to a surface
D. Shefer, A. Nikipelov, M. van de Kerkhof +2
Laser Light Scattering (LLS) method, combined with a long-distance microscope was utilized to detect micrometer-sized particles on a smooth substrate. LLS was capable to detect ind…
Particle charging during pulsed EUV exposures with afterglow effect
M. Chaudhuri, L. C. J. Heijmans, M. van de Kerkhof +3
The nanoparticle charging processes along with background spatial-temporal plasma profile have been investigated with 3DPIC simulation in a pulsed EUV exposure environment. It is f…
Electron drag force in EUV induced pulsed hydrogen plasmas
M. Chaudhuri, A. Yakunin, M. van de Kerkhof +1
Extreme ultraviolet (EUV) induced pulsed plasma is unique due to its transient characteristics: the plasma switches between non-thermal state (when EUV power is ON at the beginning…