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physics.optics2024
Polarization-based Metalenses with High Numerical Aperture and Focusing Efficiency Utilizing Silicon-rich Nitride
Alireza Khalilian, Bowen Yu, Yasha Yi
We explore the cutting-edge application of silicon-rich nitride (SRN) in the realm of high numerical aperture (NA) metalens design, focusing on the crucial role of pitch size optim…
physics.optics2022
Photonic integrated circuit with multiple waveguide layers for broadband high-efficient on-chip 3-D optical phased arrays in light detection and ranging applications
Dachuan Wu, Bowen Yu, Venus Kakdarvishi +1
Traditional photonic integrated circuit (PIC) inherits the mature CMOS fabrication process from the electronic integrated circuit (IC) industry. However, this process also limits t…