4 papers · 1 filter
Electromagnetic particle-in-cell modeling of an electron cyclotron resonance plasma discharge in hydrogen
D. Eremin, Yu. Sharova, L. Heijmans +4
A low pressure discharge sustained in molecular hydrogen with help of the electron cyclotron resonance heating at a frequency of 2.45 GHz is simulated using a fully electromagnetic…
Rotating spokes, potential hump and modulated ionization in radio frequency magnetron discharges
Liang Xu, Haoming Sun, Denis Eremin +4
In this work, the rotating spoke mode in the radio frequency (RF) magnetron discharge, which features the potential hump and the RF-modulated ionization, is observed and analyzed b…
Plasma propulsion simulation using particles
F. Taccogna, F. Cichocki, D. Eremin +2
This perspective paper deals with an overview of particle-in-cell / Monte Carlo collision models applied to different plasma-propulsion configurations and scenarios, from electrost…
Generation of energetic electrons by surface waves in VHF CCPs
D. Eremin, E. Kemaneci, M. Matsukuma +3
Capacitively coupled plasmas (CCP) comprise one of the main tool in active use in the plasma processing industry. However, increasing the driving frequency and electrode size is li…