1 citations · 2 across the 3 of their papers we have counts for
3 papers
eess.SY2023★ 1 cited
Transcending the Acceleration-Bandwidth Trade-off: Lightweight Precision Stages with Active Control of Flexible Dynamics
Jingjie Wu, Lei Zhou
Micro/Nano-positioning stages are of great importance in a wide range of manufacturing machines and instruments. In recent years, the drastically growing demand for higher throughp…
eess.SY2023
FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation towards High-Throughput IC Manufacturing
Jingjie Wu, Lei Zhou
Precision motion stages play a critical role in various manufacturing and inspection equipment, for example, the wafer/reticle scanning in photolithography scanners and positioning…
eess.SY2023★ 1 cited
Sequential Structure and Control Co-design of Lightweight Precision Stages with Active control of flexible modes
Jingjie Wu, Lei Zhou
Precision motion stages are playing a prominent role in various manufacturing equipment. The drastically increasing demand for higher throughput in integrated circuit (IC) manufact…