High-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics

Sushanth Kini Manjeshwar, Anastasiia Ciers, Fia Hellman +3

Tensile-strained materials have been used to fabricate nano- and micromechanical resonators with ultra-low mechanical dissipation in the kHz to MHz frequency range. These mechanica…