Isotropic atomic layer etching of MgO-doped lithium niobate using sequential exposures of H${}_2$ and SF${}_6$ plasmas

Ivy I. Chen, Jennifer Solgaard, Ryoto Sekine +7

Lithium niobate (LiNbO${}_3$, LN) is a ferroelectric crystal of interest for integrated photonics owing to its large second-order optical nonlinearity and the ability to impart perio…