Tailoring of rhenium oxidation state in ReOx thin films during reactive HiPIMS deposition process and following annealing

M. Zubkins, A. Sarakovskis, E. Strods +5

Bulk rhenium trioxide (ReO3) has an unusually high electrical conductivity and, being nanosized, has promising catalytic properties. However, the production of pure ReO3 thin films…