Variability Analysis in a 3-D Multi-Granular Hf${}_x$Zr${}_{1-x}$O${}_2$ Ferroelectric Capacitor

Nilesh Pandey, Karishma Qureshi, Yogesh Singh Chauhan

A simulation-based study of variability of remnant polarization $\left(P_r\right)$ in a multi-granular 3-D ultra-thin ferroelectric (FE) capacitor is presented in this paper. The…