Diffusion processes in germanium and silicon films grown on Si${}_3$N${}_4$ substrates

Larisa V. Arapkina, Kirill V. Chizh, Dmitry B. Stavrovskii +3

In this article, the results of investigation of processes occurring during the molecular-beam deposition of germanium layers on Si${}_3$N${}_4$ dielectric substrates within a wide ran…