12 citations · 12 across the 2 of their papers we have counts for
1 paper · 1 filter
Saurabh Simha, Sarveshwar Sharma, Alexander Khrabrov +3
The effect of driving frequency in the range of 13.56 MHz to 73 MHz on electron energy distribution and electron heating modes in a 50 mTorr capacitively coupled argon plasma disch…