20 citations · 38 across the 3 of their papers we have counts for
3 papers
physics.plasm-ph2022★ 8 cited
Dynamics of H atoms surface recombination in low-temperature plasma
V. Gubarev, D. Lopayev, A. Zotovich +5
The dynamics of H atom recombination on materials of interest for a EUV lithographer was studied under a longterm low-pressure H2 plasma exposure. The similarity of the experimenta…
physics.plasm-ph2020★ 20 cited
Virtual IED sensor for df rf CCP discharges
M. Bogdanova, D. Lopaev, T. Rakhimova +3
Ion-assisted surface processes are the basis of modern plasma processing. Ion energy distribution (IED) control is critical for precise material modification, especially in atomic-…
physics.plasm-ph2014★ 10 cited
Plasma probe characteristics in low density hydrogen pulsed plasmas
D. I. Astakhov, W. J. Goedheer, C. J. Lee +6
Probe theories are only applicable in the regime where the probe's perturbation of the plasma can be neglected. However, it is not always possible to know, a priori, that a particu…