87 citations · 121 across the 4 of their papers we have counts for
4 papers
Operando Electron Microscopy of Nanoscale Electronic Devices on Non-Conductive Substrates
Menglin Zhu, Michael Xu, Zishen Tian +7
Achieving operating conditions comparable to ``bulk'' electronic devices, such as thin film capacitors, during \textit{operando} electron microscopy remains challenging, particular…
Ferroelectricity of Wurtzite AlHfN Heterovalent Alloys
Nate S. P. Bernstein, Daniel Drury, Cheng-Wei Lee +11
Thin films of aluminum hafnium nitride (AlHfN) were synthesized via reactive magnetron sputtering for Hf contents up to = 0.13. X-ray diffraction showed a single…
Improving Reproducibility of Sputter Deposited Ferroelectric Wurtzite Al0.6Sc0.4N Films using In-situ Optical Emission Spectrometry
Daniel Drury, Keisuke Yazawa, Allison Mis +3
High-Sc Al1-xScxN thin films are of tremendous interest because of their attractive piezoelectric and ferroelectric properties, but overall film quality and reproducibility are wid…
Reduced Coercive Field in Epitaxial Thin Film of Ferroelectric Wurtzite Al0.7Sc0.3N
Keisuke Yazawa, Daniel Drury, Andriy Zakutayev +1
The first epitaxial ferroelectric wurtzite film with clear polarization-electric field hysteresis behavior is presented. The coercive field of this epitaxial Al0.7Sc0.3N film on W/…