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20212025
most citedShape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning

27 citations · 27 across the 3 of their papers we have counts for

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physics.optics2025

High-quality Blazed Gratings through Synergy between E-Beam lithography and Robust Characterisation Techniques

Analía F. Herrero, Nazanin Samadi, Andrey Sokolov +8

Maintaining the highest quality and output of photon science in the VUV-, EUV-, soft- and tender-X-ray energy ranges requires high-quality blazed profile gratings. Currently, their…