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20212026
most citedComputational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simulations

29 citations · 29 across the 3 of their papers we have counts for

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physics.plasm-ph2025

Multi-diagnostic characterization of inductively coupled discharges with tailored waveform substrate bias for precise control of plasma etching

Jonas Giesekus, Anton Pletzer, Florian Beckfeld +3

Precise control of ion energy distribution functions (IEDF) is crucial for selectivity as well as control over sputter rate and substrate damage in nanoscale plasma processes. In t…