2 papers
physics.data-an2026
Titanic overconfidence -- dark uncertainty can sink hybrid metrology for semiconductor manufacturing
Ronald G. Dixson, Adam L. Pintar, R. Joseph. Kline +4
Hybrid metrology for semiconductor manufacturing is on a collision course with dark uncertainty. An IEEE technology roadmap for this venture has targeted a linewidth uncertainty of…
physics.app-ph2021
Demonstration of a laser powder bed fusion combinatorial sample for high-throughput microstructure and indentation characterization
Jordan S. Weaver, Adam L. Pintar, Carlos Beauchamp +3
High-throughput experiments that use combinatorial samples with rapid measurements can be used to provide process-structure-property information at reduced time, cost, and effort.…