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physics.optics2025
Dynamic Imaging of Periodic Structures using Extreme Ultraviolet Scatterometry
Brendan McBennett, Michael Tanksalvala, Emma E. Nelson +10
Dynamic scattering and imaging with coherent, ultrafast, extreme ultraviolet (EUV) light sources can resolve charge, phonon and spin processes on their intrinsic length and time sc…
physics.optics2024★ 134 cited
Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry
Michael Tanksalvala, Christina L. Porter, Yuka Esashi +22
Next-generation nano and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by…