most citedRole of electron and ion irradiation in a reliable lift-off process with e-beam evaporation and a bilayer PMMA resist system

12 citations · 12 across the 1 of their papers we have counts for

collaborators

1 paper

physics.app-ph2021★ 12 cited

Role of electron and ion irradiation in a reliable lift-off process with e-beam evaporation and a bilayer PMMA resist system

Bin Sun, Thomas Grap, Thorben Frahm +2

This paper addresses issues related to cracking and blisters in deposited films encountered in a lift-off process with electron beam evaporation and a bilayer PMMA resist system. T…