241 citations · 473 across the 6 of their papers we have counts for
4 papers · 1 filter
Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry
Michael Tanksalvala, Christina L. Porter, Yuka Esashi +22
Next-generation nano and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by…
Sub-wavelength coherent imaging of periodic samples using a 13.5 nm tabletop high harmonic light source
Dennis F. Gardner, Michael Tanksalvala, Elisabeth R. Shanblatt +9
Coherent diffractive imaging is unique as the only route for achieving diffraction-limited spatial resolution in the extreme ultraviolet and X-ray regions, limited only by the wave…
High-resolution ptychographic imaging at a seeded free-electron laser source using OAM beams
M. Pancaldi, F. Guzzi, C. S. Bevis +21
Electromagnetic waves possessing orbital angular momentum (OAM) are powerful tools for applications in optical communications, new quantum technologies and optical tweezers. Recent…
Quantitative Chemically-Specific Coherent Diffractive Imaging of Buried Interfaces using a Tabletop EUV Nanoscope
Elisabeth R. Shanblatt, Christina L. Porter, Dennis F. Gardner +8
Characterizing buried layers and interfaces is critical for a host of applications in nanoscience and nano-manufacturing. Here we demonstrate non-invasive, non-destructive imaging…