91 citations · 91 across the 3 of their papers we have counts for
3 papers
Double Step Annealing for the Recovering of Ion Implantation Defectiveness in 4H-SiC DIMOSFET
Massimo Zimbone, Nicolo Piluso, Grazia Litrico +6
Thermal annealing plays a crucial role for healing the defectiveness in the ion implanted regions of DIMOSFETs (Double Implanted MOSFETs) devices. In this work, we have studied the…
Thermal Annealing of High Dose P Implantation in 4H-SiC
Cristiano Calabretta, Massimo Zimbone, Eric G. Barbagiovanni +7
In this work, we have studied the crystal defectiveness and doping activation subsequent to ion implantation and post-annealing by using various techniques including photoluminesce…
Correlation between microstructure deflections and film/substrate curvature under generalized stress fields
Massimo Camarda, Ruggero Anzalone, Giuseppe D'Arrigo +5
In this article we develop an analytical theory that correlates the macroscopic curvature of stressed film/substrate systems with the microscopic in-plane and out-of-plane deflecti…