2 citations · 3 across the 2 of their papers we have counts for
2 papers
eess.SY2021★ 2 cited
Learning-based feedforward augmentation for steady state rejection of residual dynamics on a nanometer-accurate planar actuator system
Ioannis Proimadis, Yorick Broens, Roland Tóth +1
Growing demands in the semiconductor industry result in the need for enhanced performance of lithographic equipment. However, position tracking accuracy of high precision mechatron…
eess.SY2018★ 1 cited
Feedforward Control of Magnetically Levitated Planar Actuators
T. Bloemers, I. Proimadis, Y. Kasemsinsup +1
The present report summarizes the work conducted during the internship on Feedforward Control of the Magnetic Levitation Setup. Different feedforward strategies, specifically tailo…