31 citations · 60 across the 4 of their papers we have counts for
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physics.app-ph2023
A hybrid polymer/ceramic/semiconductor fabrication platform for high-sensitivity fluid-compatible MEMS devices with sealed integrated electronics
Nahid Hosseini, Matthias Neuenschwander, Jonathan D. Adams +7
Active microelectromechanical systems can couple the nanomechanical domain with the electronic domain by integrating electronic sensing and actuation mechanisms into the micromecha…
physics.app-ph2020★ 29 cited
Plasma-enhanced atomic layer deposition of nickel nanotubes with low resistivity and coherent magnetization dynamics for 3D spintronics
M. C. Giordano, K. Baumgaertl, S. R. Escobar Steinvall +4
We report plasma-enhanced atomic layer deposition (ALD) to prepare conformal nickel thin films and nanotubes by using nickelocene as a precursor, water as the oxidant agent and an…