activity
20152025
most citedZero-dimensional and pseudo-one-dimensional models of atmospheric-pressure plasma jet in binary and ternary mixtures of oxygen and nitrogen with helium background

27 citations · 62 across the 10 of their papers we have counts for

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Showing 2023Show all

2 papers · 1 filter

cond-mat.soft2023★ 1 cited

PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films

Teresa de los Arcos, Peter Awakowicz, Marc Böke +19

This feature article presents insights concerning the correlation of PECVD and PEALD thin film structures with their barrier or membrane properties. While in principle similar prec…

physics.plasm-ph2023

Generation of energetic electrons by surface waves in VHF CCPs

D. Eremin, E. Kemaneci, M. Matsukuma +3

Capacitively coupled plasmas (CCP) comprise one of the main tool in active use in the plasma processing industry. However, increasing the driving frequency and electrode size is li…