13 citations · 18 across the 9 of their papers we have counts for
Showing 2021Show all
2 papers · 1 filter
physics.optics2021★ 2 cited
Talbot photolithography optimization with engineered hybrid metal-dielectric mask: High-contrast and highly-uniform Talbot stripes
Yu. E. Geints, I. V. Minin, O. V. Minin
Conventional projection Talbot lithography usually employs opaque (amplitude) or transparent (phase) masks for creating a periodic array of Fresnel diffraction fringes in the photo…
physics.app-ph2021★ 1 cited
Concept of miniature optical pressure sensor based on coupled WGMs in a dielectric microsphere
Yu. E. Geints, I. V. Minin, O. V. Minin
We present the physical concept and sample engineering design of a new miniature pressure sensor based on the whispering gallery modes (WGMs) optically excited in a dielectric micr…