2 papers
physics.app-ph2021
Acoustic Metal Particle Focusing in a Round Glass Capillary
M. S. Gerlt, A. Paeckel, A. Pavlic +3
Two-dimensional metal particle focusing is an essential task for various fabrication processes. While acoustofluidic devices can manipulate particles in two dimensions, the product…
physics.plasm-ph2021
Reduced etch lag and high aspect ratios by deep reactive ion etching (DRIE)
M. S. Gerlt, N. F. Läubli, M. Manser +2
Deep reactive ion etching (DRIE) with the Bosch process is one of the key procedures used to manufacture micron-sized structures for MEMS and microfluidic applications in silicon a…