20 citations · 58 across the 6 of their papers we have counts for
7 papers
Hydrogen plasma-assisted atomic layer epitaxy of superconducting titanium nitride
Yi-Hsun Chen, Yin-Chun Huang, Zachary Degnan +10
Atomic layer deposition (ALD) offers precise, conformal control of thin-film growth and is a workhorse for semiconductor manufacturing, but its use in superconducting quantum circu…
Reducing TLS loss in tantalum CPW resonators using titanium sacrificial layers
Zachary Degnan, Chun-Ching Chiu, Yi-Hsun Chen +5
We demonstrate a substantial reduction in two-level system loss in tantalum coplanar waveguide resonators fabricated on high-resistivity silicon substrates through the use of an ul…
Open-Source Highly Parallel Electromagnetic Simulations for Superconducting Circuits
David Sommers, Zach Degnan, Divita Gautam +4
Electromagnetic simulations form an indispensable part of the design and optimization process for superconducting quantum devices. Although several commercial platforms exist, open…
Near-field localization of the boson peak on tantalum films for superconducting quantum devices
Xiao Guo, Zachary Degnan, Julian Steele +6
Superconducting circuits are among the most advanced quantum computing technologies, however their performance is currently limited by losses found in surface oxides and disordered…
Ternary Metal Oxide Substrates for Superconducting Circuits
Zach Degnan, Xin He, Alejandro Gomez Frieiro +3
Substrate material imperfections and surface losses are one of the major factors limiting superconducting quantum circuitry from reaching the scale and complexity required to build…
Terahertz nanospectroscopy of plasmon polaritons for the evaluation of doping in quantum devices
Xiao Guo, Xin He, Zach Degnan +6
Terahertz (THz) waves are a highly sensitive probe of free carrier concentrations in semiconducting materials. However, most experiments operate in the far-field, which precludes t…
Near-Field Terahertz Nanoscopy of Coplanar Microwave Resonators
Xiao Guo, Xin He, Zach Degnan +5
Superconducting quantum circuits are one of the leading quantum computing platforms. To advance superconducting quantum computing to a point of practical importance, it is critical…