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cond-mat.mtrl-sci2025
In-vacuum surface flashover of SiN, AlN, and etched SiO2 thin films at micrometre scales
Vijay Kumar, Martin Siegele-Brown, Matthew Aylett +2
We investigate the surface flashover voltage threshold for SiO, SiN, and AlN thin films over micrometre scale lengths. Furthermore, we test the effects of different etching che…
cond-mat.mtrl-sci2012★ 26 cited
Increased surface flashover voltage in microfabricated devices
R. C. Sterling, M. D. Hughes, C. J. Mellor +1
With the demand for improved performance in microfabricated devices, the necessity to apply greater electric fields and voltages becomes evident. When operating in vacuum, the volt…