Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride

Hani Nejadriahi, Steve Pappert, Yeshaiahu Fainman +1

The design, fabrication, and characterization of low loss ultra-compact bends in high index (n = 3.1 at λ = 1550 nm) PECVD silicon rich silicon nitride (SRN) is demonstrated and ut…