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physics.app-ph2021★ 31 cited
Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride
Hani Nejadriahi, Steve Pappert, Yeshaiahu Fainman +1
The design, fabrication, and characterization of low loss ultra-compact bends in high index (n = 3.1 at λ = 1550 nm) PECVD silicon rich silicon nitride (SRN) is demonstrated and ut…
physics.app-ph2020★ 65 cited
Thermo-Optic Properties of Silicon-Rich Silicon Nitride for On-chip Applications
Hani Nejadriahi, Alex Friedman, Rajat Sharma +3
We demonstrate the thermo-optic properties of silicon-rich silicon nitride (SRN) films deposited using plasma-enhanced chemical vapor deposition (PECVD). Shifts in the spectral res…