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physics.app-ph2021★ 4 cited
Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation
Gengyang Mu, Nikaya Snell, Chang Zhang +5
We observe the actuation of silicon nitride (SiN) nanomechanical resonators by electrical excitation of metal-dielectric-semiconductor (MDS) capacitors on their supporting silicon…
physics.app-ph2021
Heat Transport in Silicon Nitride Drum Resonators and its Influence on Thermal Fluctuation-induced Frequency Noise
Nikaya Snell, Chang Zhang, Gengyang Mu +2
Silicon nitride (SiN) drumhead resonators offer a promising platform for thermal sensing due to their high mechanical quality factor and the high temperature sensitivity of their r…