29 citations · 48 across the 6 of their papers we have counts for
4 papers · 1 filter
Demonstration of Frequency Stability limited by Thermal Fluctuation Noise in Silicon Nitride Nanomechanical Resonators
Chang Zhang, Raphael St-Gelais
The frequency stability of nanomechanical resonators (NMR) dictates the performance level of many state-of-the-art sensors (e.g., mass, force, temperature, radiation) that relate a…
Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation
Gengyang Mu, Nikaya Snell, Chang Zhang +5
We observe the actuation of silicon nitride (SiN) nanomechanical resonators by electrical excitation of metal-dielectric-semiconductor (MDS) capacitors on their supporting silicon…
Heat Transport in Silicon Nitride Drum Resonators and its Influence on Thermal Fluctuation-induced Frequency Noise
Nikaya Snell, Chang Zhang, Gengyang Mu +2
Silicon nitride (SiN) drumhead resonators offer a promising platform for thermal sensing due to their high mechanical quality factor and the high temperature sensitivity of their r…
Radiative Heat Transfer in Free-Standing Silicon Nitride Membranes
Chang Zhang, Mathieu Giroux, Thea Abdul Nour +1
Free-standing silicon nitride (SiN) mechanical resonators are of central interests in applications such as temperature and mass sensing, and for fundamental optomechanical reasearc…