46 citations · 46 across the 2 of their papers we have counts for
2 papers
physics.ins-det2023
Pressure Sensor Chip with New Electrical Circuit for 10 kPa Range
Mikhail Basov
Characteristics of high sensitivity MEMS pressure sensor chip for 10 kPa utilizing a novel electrical circuit are presented. The electrical circuit uses piezosensitive differential…
physics.app-ph2021★ 46 cited
Schottky diode temperature sensor for pressure sensor
M. Basov
The small silicon chip of Schottky diode (0.8x0.8x0.4 mm3) with planar arrangement of electrodes (chip PSD) as temperature sensor, which functions under the operating conditions of…