8 citations · 12 across the 2 of their papers we have counts for
2 papers
physics.app-ph2021★ 4 cited
Wet Scandium Etching for hard mask formation on a silicon substrate
Julia Bondareva, Ekaterina Timofeeva, Alexandr Anikanov +6
Nowadays, microelectronics and nanoelectronics require the search for new materials, including masks for creating structures. Today, the intermediate hard mask strategy is one of t…
cond-mat.supr-con2021★ 8 cited
Investigation of superconducting properties of NbN films deposited by DC magnetron sputtering on high-k dielectric HfO2 buffer layer
N. V. Porokhov, A. P. Sirotina, E. A. Pershina +9
The influence of the buffer layer of hafnia dielectric on superconducting properties of niobium nitride films, produced by the technique of the reactive magnetron depositing has be…