8 citations · 8 across the 2 of their papers we have counts for
2 papers
cond-mat.supr-con2023
Superconducting TSV contact for cryoelectronic devices
Ivan Filippov, Alexandr Anikanov, Aleksandr Rykov +6
This work focuses on the fabrication of niobium through silicon vias (TSV) superconductors interconnects. The effect of supercycle of sequential oxidation and chemical etching proc…
cond-mat.supr-con2021★ 8 cited
Investigation of superconducting properties of NbN films deposited by DC magnetron sputtering on high-k dielectric HfO2 buffer layer
N. V. Porokhov, A. P. Sirotina, E. A. Pershina +9
The influence of the buffer layer of hafnia dielectric on superconducting properties of niobium nitride films, produced by the technique of the reactive magnetron depositing has be…